Tel：+86-535-2169175
Mobile：+86-535-2169072
E-mail：sales@brightstonemems.cn
Add.：No. 46, Taipei North Road, Development Zone, Yantai City, Shandong Province, China
Ventilator; Oxygen generator; Gas mask and respirator; Sprayer; Continuous positive airway pressure (CPAP) equipment; Applications: Anesthesia delivery; Detect leaks; Spectrograph; Mass flow controller; Environmental climate control.
Features
Wide flow range: 0-500SLPM
High accuracy (1.5%F.S accuracy)
Linear output and temperature compensation
Maintain long-term stability with minimal zero drift
Solid sensing core (no surface cavity or fragile film), resistant to clogging and pressure shock
Analog output (1 to 5V) (digital I2C communication output can be provided)
Fast response time (9ms/20ms/60m sresponse time)
Main Applications
Ventilator; Oxygen generator; Gas mask and respirator; Sprayer; Continuous positive airway pressure (CPAP) equipment; Anesthesia delivery; Detect leaks; Spectrograph; Mass flow controller; Environmental climate control.
Maximum Value
Operating temperature:-25℃~85℃
Storage temperature: -40℃~99℃
Humidity: 0~100%RH*
Shock resistance: 100g
The sensor is resistant to condensation.
Electrical Characteristics
Test condition: VIN=12±0.01VDC, Ta=25℃
Relative humidity: 40%<relative temperature<60%
Maximum operating temperature range: -25℃~85℃
Flow Range | Unit | Remark | |
MSFM4003V | 0-12 | SLM | 0.525 |
MSFM4004V | 0-20 | SLM | 0.872 |
MSFM4005V | 0-35 | SLM | 1.51 |
MSFM4100V | 0-50 | SLM | 2.18 |
MSFM4101V | 0-100 | SLM | 4.37 |
MSFM4102V | 0-150 | SLM | 6.56 |
MSFM4103V | 0-200 | SLM | 8.76 |
MSFM4104V | 0-300 | SLM | 13.14 |
MSFM4105V | 0-500 | SLM | 35.3 |
Specifications | Min | Normal Value | Max | Unit |
Analog voltage output | 1 | __ | 2000 | VDC |
Zero voltage | 0.95 | 1 | 24 | VDC |
Zero Drift | __ | __ | 15 | %F.S |
Load | __ | 5 | 5.02 | kΩ |
Precision | __ | 1.5 | 2 | %F.S |
Response Time | __ | 20 | 30 | mSec |
Supply voltage | 8 | 0.1 | __ | VDC |
Power Supply | 20 | 20 | 30 | mA |
Resolution | __ | 0.1 | __ | %F.S |
Overall Material | Silicon carbide, epoxy resin, polyphenylene sulfide, FR4, Use silicon as a sealing material | |||
1.Customizable range between 10SLPM and 50SLPM;
2.SLM：Standard liters per minute. Standard conditions: 0℃ and 1 atmosphere;
3.In addition, the bidirectional air flow test can be customized to simulate the corresponding changes in the output, F (min) -F (max) corresponds to 1-5V output, and 0 flow rate corresponds to 3V;
4.Including temperature drift and linear error;
5. 5V supply voltage is available.
Linear Output
1.Unidirectional Airflow Mode
Flow rate =[ (VOUT-1V) /4V]* flow range
For example, the CADS4103 has 200 SLM with a flow range. When the output voltage is 2.5V, the instantaneous flow rate is [ (2.5-1V) /4V*200SLM]=75 SLM
2. Bidirectional Airflow Mode
Forward flow=[ (VOUT-3V) /2V]*flow range flow
Reverse flow=[ (3V-VOUT) /2V]*flow range flow
