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Mobile:+86-535-2169072

E-mail:sales@brightstonemems.cn

Add.:No. 46, Taipei North Road, Development Zone, Yantai City, Shandong Province, China

MEMS Flow Sensors
MSFM3000 thermal film air-mass sensors

Applications: Ventilator; Oxygen generator; Gas mask and respirator; Sprayer; Continuous positive airway pressure (CPAP) equipment; Anesthesia delivery; Detect leaks; Spectrograph; Mass flow controller; Environmental climate control.

Features

  • High accuracy (1.5%F.S accuracy)

  • Linear output and no temperature compensation needed

  • Maintain long-term stability with minimal zero drift

  • Solid sensing core (no surface cavity or fragile film), resistant to clogging and pressure shock

  • Analog output (1 to 5V) (digital I2C communication output can be provided)

  • Fast response time (1ms response time)

  • Wide flow range: 0-2000sccm

  • Adapt to the measurement of relatively humid gases


Main Applications

    Ventilator; Oxygen generator; Gas mask and respirator; Sprayer; Continuous positive airway pressure (CPAP) equipment; Anesthesia delivery; Detect leaks; Spectrograph; Mass flow controller; Environmental climate control.


    Maximum Value

    Operating temperature: -25℃~85

    Storage temperature: -40℃~99

    Humidity: 0~100%RH*

    Shock resistance: 100g

    The sensor is resistant to condensation


    Electrical Characteristics

    Test condition: VIN=12±0.01VDC

    Relative humidity: 40%<relative temperature<60%

    Maximum operating temperature range: -25℃~85


    Specifications

    Min

    Normal Value

    Max

    Unit

    Remark

    Flow Range

    0

    __

    2000

    sccm

    Customizable

    Supply Voltage

    8

    12

    24

    V

    __

    Electricity

    20

    __

    15

    mA

    __

    Maximum Voltage Output

    4.94

    5

    5.02

    V

    __

    Zero Voltage Output

    0.98

    1

    1.02

    __

    __

    Precision

    __

    1.5

    2

    %F.S

    __

    Resolution

    __

    0.1

    __

    %

    Full Scale

    Response Time

    __

    20

    30

    ms

    __

    Zero Drift

    __

    0.2

    __

    %Year

    Full Scale

    Temperature Drift

    __

    __

    4

    %

    0~50

    Overall Material

    Silicon carbide, epoxy resin, polyphenylene sulfide, FR4, Use silicon as a sealing material


    Linear Output

    Flow rate =[ (VOUT-1V) /4V]* flow range

    For example, the CAFS3000 has 1000sccm with a flow range. When the output voltage is 2.5V, the instantaneous flow rate is [ (2.5-1V) /4V*1000sccm]=375 sccm

    FS2_副本.png




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