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Tel:+86-535-2169175

Mobile:+86-535-2169072

E-mail:sales@brightstonemems.cn

Add.:No. 46, Taipei North Road, Development Zone, Yantai City, Shandong Province, China

MEMS Flow Sensors
MSFM5008 thermal film air-mass sensors

Applications: Ventilator; Oxygen generator; Gas mask and respirator; Sprayer; Continuous positive airway pressure (CPAP) equipment; Anesthesia delivery; Detect leaks; Spectrograph; Mass flow controller; Environmental climate control.

Features

  • High accuracy (1.5%F.S accuracy)

  • Linear output and no temperature compensation needed

  • Maintain long-term stability with minimal zero drift

  • Fast response time (20ms response time)

  • Wide flow rate range for 0-60m/s, shock resistance for 100g

  • Solid sensing core (no surface cavity or fragile film), resistant to clogging and pressure shock

  • Analog output (1 to 5V) (digital I2C communication output can be provided)

  • Adapt to the measurement of relatively humid gases

  • Operating temperature: -25~85

  • Storage temperature: -40~90

  • Humidity: 0~100%RH

  • The sensor is resistant to condensation


Main Applications

Ventilator; Oxygen generator; Gas mask and respirator; Sprayer; Continuous positive airway pressure (CPAP) equipment; Anesthesia delivery; Detect leaks; Spectrograph; Mass flow controller; Environmental climate control.


Performance Parameters

Function Item

Performance Parameter

Unit

Remark

Flow Range

20/50/100/200

slpm

Customizable

Power Supply

8~24VDC, 50mA

VDC

Optional

Precision

±1.5

%

FS

Response Time

20

ms

Optional

Maximum Pressure

0.8

MPa

Customizable

Communication Mode

I2C

__

Optional

Output Mode

Analog output (1 to 5V)

V

__

Temperature

Medium Temperature(-10~65),Ambient Temperature(-25~85)

__

Interface

G3/8

__

Customizable

Protection Level

IP40

__

__

Calibration Mood

Air, 0, 101.325kPa

__

__

Overall Material

Stainless Steel (Aluminum alloy is available)

__

__

 

Linear Output

Flow rate =[ (VOUT-1V) /4V]* flow range

For example, the MSFM5008 has 100slpm with a flow range of 37.5slpm

When the output voltage is 2.5V, the instantaneous flow rate is [ (2.5-1V) /4V*100slpm]=37.5 slpm

FS1_副本.png









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